三维微机电系统结构静电性质的计算

介绍对任意厚度极板同样准确并对需要计算的静电性质的任意结构适用的边界元方法解算器,包括那些适于微机电系统的算法.解算器准确度的原因是使用闭形解析表达式的事实,这些表达式在整个物理范畴对计算感应系数是非常有效的.这样,有可能使边界元方法最严格的近似失效,也就是电荷分布在边界单元上的效应可以用定位在单位元的质心的电荷近似.这里,专心于结构的电荷密度和电容,二者对有效的微机电系统的设计都非常重要.

Computation of Electrostatic Properties of 3D MEMS Structures

We present a BEM solver which is equally accurate for plates of any thickness and applicable for any structure for which electrostatic properties need to be computed,including those relevant for MEMS.The reason behind the accuracy of the solver is the fact that it uses closed-form analytic expressions that are valid seamlessly throughout the physical domain for computing the influence coefficients.Thus,it is possible to avoid one of the most serious approximations of the BEM,namely,the assumption that the effect of a charge distributed over a boundary element can be approximated by charge located at the centroid of the element.Here,we concentrate on the charge density and the capacitance of the structure,both of which are very important for the design of efficient MEMS.