电沉积镍薄膜早期形核生长的计算机模拟

介绍了动力学蒙特卡罗方法模拟薄膜生长的基本理论,对电沉积镍薄膜早期形核生长进行了模拟,发现镍薄膜的亚单层生长可以分为四个阶段,随着基底温度的上升,岛的密度减少,岛的尺寸增大,岛的分形维数增大;随着沉积率的上升,岛的密度上升,岛的尺寸减小,岛的分形维数减小;随着覆盖率的增加,岛的尺寸增大,分形维数不变.

The Computer Simulation of Early Nucleation andGrowth of Electrodeposited Ni Thin Films

The paper introduces the theory that simulates thin film growth with the kinetic Monte Carlo method.The simulations of submonolayer growth of electrodeposited Ni thin films with KMC method discover that there are four growth rules.Firstly,the growth of submonolayer can be carried out in four stages according to island distribution.Secondly,when substructure temperature increases,the island density decreases,the island size increases and the fractal dimension enlarges.Thirdly,when deposition rate raises,the island density increases,the island size decreases and the fractal dimension reduces.Fourthly,when coverage increases,the island size increases and the fractal dimension is constant.