|
|||||
|
|
| 微机械（MEMS）与微细加工技术 | |
| 引用本文： | 段润保 赵砚江 毛言理. 微机械（MEMS）与微细加工技术[J]. 河北理工学院学报, 2004, 26(2): 34-40 |
| 作者姓名： | 段润保 赵砚江 毛言理 |
| 作者单位： | [1]上海交通大学机械与动力工程学院，上海030020 [2]河北理工学院机械工程系，河北唐山063009 |
| 摘 要： | 首先对微机械(MEMS)的分类及其特点作了简明的阐述，在此基础上，着重评介了近年来该领域各种微细加工方法及其能够达到的加工尺度与水平。指出当前微细加工技术仍然在以使用物理和化学能量的特种加工为主，并呈现加工材料扩大化、产品机构复杂和加工手段复合化的发展态势。 |
| 关 键 词： | 微机械 微细加工 MEMS 超精密机械加工 电子柬刻蚀 微细电火花加工 微细超声加工 |
| 文章编号： | 1007-2829(2004)02-0034-07 |
| 修稿时间： | 2003-05-06 |
The new development of MEMS and micro-machining |
|
| DUAN Hun-bao,ZHAO Yan-Jiang,MAO Yan-li College of Mechanical and Power Engineering,Shanghai Jiao Tong University,Shanghai ,China. The new development of MEMS and micro-machining[J]. Journal of Hebei Institute of Technology, 2004, 26(2): 34-40 | |
| Authors: | DUAN Hun-bao ZHAO Yan-Jiang MAO Yan-li College of Mechanical Power Engineering Shanghai Jiao Tong University Shanghai China |
| Affiliation: | DUAN Hun-bao,ZHAO Yan-Jiang,MAO Yan-li College of Mechanical and Power Engineering,Shanghai Jiao Tong University,Shanghai 030020,China Department of Mechanical Engineering,Hebei Institute of Technology,Tangshan Hebei 063009,China |
| Abstract: | Based on the general grasp of the classification and charicteristic of MEMS, this paper summarizes vari-ous micro and precision processes in this field and its dimensional limitation and capacity. Some photos are selecct-ed to show related micro-tools and machining equipment. Finally, the paper concluded that the nontraditionalprocesses, which use physical and chemical energy,are still playing a main role in MEMS, at the same time threetendencies are emerging. These three tendencies are as follow: (1) Materials to be machined are being broadened;(2) The products and parts of MEMS are becoming more complicated; and (3) Different manufacturing processesare mixing together. |
| Keywords: | |
| 本文献已被 CNKI 维普 等数据库收录！ | |