采用线阵型光学传感器的晶圆预对准方法

为提高晶圆圆心定位算法的效率和缺口定位算法的精度,设计了基于线阵型光学传感器的晶圆预对准装置。圆心定位采用改进的线性化最小二乘圆拟合方法,缺口定位采用Leven-berg-Marquardt算法。仿真结果表明,该方法可有效减少圆心定位算法的计算时间,缺口定位精度较现有定位方法提高近1倍。该方法可用于晶圆预对准的实际应用。

Wafer pre-aligning method based on linear optical sensor

Aimed at improving the efficiency of the wafer center point location algorithm and the precision of notch localization algorithm, this paper introduces a wafer prealigner based on line-array optical sensor. The paper describes an improved method of linear least-squares circle fitting used to the center point location and a Levenberg-Marquardt algorithm used to notch localization. The simulation results show that the method features an effective reduction in the computing time of the center point location algorithm and the notch localization gives precision twice as great as the existing localization methods. It follows that the method can find a practical use in wafer pre-alignment.