基于电容式微机械声学传感的纳米梁非线性振动控制

电容式微机械声学传感器(CMUT)具有高带宽、易集成阵列化、无需匹配层、灵敏度高等优点,利用CMUT器件检测纳米梁产生的声波信号,得到纳米梁的振动信息,将CMUT器件置于纳米梁下方作为振动信号检测传感器。应用静电反馈控制器,以Euler-Bornoulli梁为振动模型,提出基于CMUT传感的纳米梁非线性振动控制方法,建立纳米梁非线性振动微分方程,应用多尺度方法研究纳米梁的非线性振动控制。分析了控制增益等系统参数与纳米梁非线性振动之间的关系,研究了改变系统参数来增强系统振动稳定性的方法。研究结果表明,选择合适的系统参数可以减弱甚至消除系统振动的非线性并增强系统的稳定性。

Nonlinear Vibration Control of Nano-beam Based on Capacitive Micro-mechanical Acoustic Sensors

Capacitive micro-mechanical acoustic sensors (CMUT for short) had the advantages of high bandwidth, easy integration of array, no matching layer, high sensitivity, etc. The CMUT device was used to detect the acoustic signal which generated by the nano-beam to detect the vibration information of the nano-beam. It is placed under the nano-beam as a vibration signal detecting sensor. The Euler-Bornoulli beam was used as the vibration model and a vibration control method based on CMUT was proposed by the electrostatic feedback controller. The nonlinear vibration control equation of nano-beam was established. The multi-scale method was used to study the nonlinear vibration control of the nano-beam. The relationship between the vibration nonlinearity of the nano-beam and system parameters such as control gain were analyzed. Methods to increase the vibration stability of the system by change the system parameters were studied. The results show that by selecting appropriate system parameters can weak even eliminate the nonlinear vibration of the system and enhance the stability of the system.