| 热阴极辉光PACVD金刚石厚膜的生长特性 |
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| 引用本文： | 孙海平,于三,姜志刚,李冬妹,柳林,金曾孙,邹广田.热阴极辉光PACVD金刚石厚膜的生长特性[J].吉林大学学报(理学版),1996(2). |
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| 作者姓名： | 孙海平 于三 姜志刚 李冬妹 柳林 金曾孙 邹广田 |
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| 作者单位： | 吉林大学超硬材料国家重点实验室 |
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| 摘 要： | 对用热阴极辉光ＰＡＣＶＤ方法合成的金刚石厚膜，采用扫描电子显微镜进行了观察，研究了金刚石的生长机制．
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| 关 键 词： | 金刚石厚膜，等离子体辅助化学气相沉积，孪晶，台阶，扫描电镜 |
Layer Growth in Thick Diamond Film Prepared by Hot Cathod Glow Discharge Plasma Asisted Chemical Vapor Deposition |
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| Sun Haiping,Yu San,Jiang Zhigang,Li Dongmei,Liu Lin,Jin Zengsun,Zou Guangtian.Layer Growth in Thick Diamond Film Prepared by Hot Cathod Glow Discharge Plasma Asisted Chemical Vapor Deposition[J].Journal of Jilin University: Sci Ed,1996(2). |
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| Authors: | Sun Haiping Yu San Jiang Zhigang Li Dongmei Liu Lin Jin Zengsun Zou Guangtian |
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| Abstract: | Thick diamond film is prepared by using hot cathod glow discharge plasma assisted chemical vapor deposition and investigated by scanning electron microscopy.The growth mechanism of the diamond is studied. |
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| Keywords: | thick diamond film PACVD twin crystal step SEM |
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