| 基于原子力显微镜的纳米级表面粗糙度测量 |
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| 引用本文： | 韩贤武,陈小安,杨学恒,白海会.基于原子力显微镜的纳米级表面粗糙度测量[J].重庆大学学报(自然科学版),2007,30(2):5-8. |
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| 作者姓名： | 韩贤武 陈小安 杨学恒 白海会 |
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| 作者单位： | 重庆大学机械传动国家重点实验室,重庆,400030;重庆大学数理学院,重庆,400030 |
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| 摘 要： | 简要介绍了评定表面粗糙度参数的基准线及其主要的两个轮廓高度评定参数,详细阐述了重庆大学研制成功的一种高精度原子力显微镜--AFM.IPC-208B型机的工作原理及其系统结构,着重论述了它在纳米级表面粗糙度检测上的应用.以不锈钢为实验样品,观测了不锈钢表面的微观结构,通过专用的计算程序,对所采集到的表面数据进行了分析和处理,得到了该表面的两个轮廓高度评定参数Rz和Ra值,最后对实验结果进行了简要的分析.
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| 关 键 词： | 原子力显微镜 表面粗糙度 纳米级 数学模型 |
| 文章编号： | 1000-582X(2007)02-0005-04 |
| 修稿时间： | 2006-05-22 |
Nanometer Scale Surface Roughness Measurement Based on AFM |
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| HAN Xian-wu,CHEN Xiao-an,YANG Xue-heng,BAI Hai-hui.Nanometer Scale Surface Roughness Measurement Based on AFM[J].Journal of Chongqing University(Natural Science Edition),2007,30(2):5-8. |
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| Authors: | HAN Xian-wu CHEN Xiao-an YANG Xue-heng BAI Hai-hui |
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| Institution: | 1. State Key Laboratory of Mechanical Transmission ; College of Mathematics and Physics, Chongqing University, Chongqing 400030, China |
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| Abstract: | The datum line and mainly three profile height parameters of surface roughness are briefly introduced and the operation principle and system structure of AFM. IPC - 208B with high-resolution, which was successfully developed by Chongqing University, are described in detail, and the emphasis is laid on its application on the nanometer scale surface roughness. Taking stainless steel for example, its micro-structure was observed, and the surface data were analyzed and transacted by special evaluator and the values of three profile height parameters were obtained. Finally the experimental results are briefly analyzed. |
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| Keywords: | surface roughness nanometer scale mathematical model |
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