衬底温度对ZnO：Al薄膜结构和光透过性能的影响

利用超声喷雾热解方法以不同的沉积温度（450～530℃）在石英衬底上制备出具备较高光学质量的ZnO：Al（AZO）薄膜.通过X射线衍射谱（XRD）研究了薄膜的结构,用扫描电子显微镜（SEM）研究了薄膜的表面形貌,用紫外可见（UV）分光光度计对薄膜的光透过特性进行了测试分析.结果表明：所制备薄膜在可见波段具有较高透过率,并且沉积温度对AZO薄膜的结构和光透过性能有很大影响.在衬底温度为470℃时得到的AZO薄膜具有（002）择优取向,结晶质量最好、光透过率最高,在可见光区平均透过率达到85%以上.

Influence of substrate temperature on structure and transmission properties of ZnO:Al thin films

ZnO：Al（AZO） thin films with better optical properties were successfully prepared on quartz substrate by ultrasonic spray pyrolysis method at different substrate temperatures（450~530 ℃）.Structural,morphological and transmission properties of AZO thin films were investigated by X-ray photoelectron spectroscopy（XRD）,scanning electron microscopy（SEM） and UV-Vis spectrophotometer（UV）.Experimental results show that all the deposited films have good transmittance,and the substrate temperature has significantly effects on structure and transmission properties.The AZO thin films deposited at 470 ℃grow preferentially in the（002） direction with better crystalline quality and higher transmittance.The average optical transmittance in the visible spectrum exceeds 85%.