| ZnO/SnO_2双层薄膜型气敏传感器 |
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| 引用本文： | 娄向东,沈荷生.ZnO/SnO_2双层薄膜型气敏传感器[J].河南师范大学学报(自然科学版),1993,21(4):42-47. |
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| 作者姓名： | 娄向东 沈荷生 |
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| 作者单位： | 河南师范大学化学系 453002(娄向东)，河南师范大学化学系 新乡(夏志清)，中国科学技术大学材料科学与工程系 453002(沈荷生)，中国科学技术大学材料科学与工程系 新乡(沈瑜生) |
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| 摘 要： | 将纯的ZnO及SnO_2采用等离子溅射法制成ZnO/SnO_2双层膜,用XPS,SEM,XRD等手段对薄膜进行了分析测试。比较了单层SnO_2及ZnO薄膜与双层ZnO/SnO_2膜的气敏性质,发现双层膜较单层膜在灵敏度及选择性上都有所提高。简单讨论了元件的气敏机制。
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| 关 键 词： | SnO_2 ZnO 薄膜 灵敏度 气敏机制 |
ZnO/SnO_2Bilayer Thin Film Gas Sensor |
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| Lou Xiangdong,Xia Zhiqing.ZnO/SnO_2Bilayer Thin Film Gas Sensor[J].Journal of Henan Normal University(Natural Science),1993,21(4):42-47. |
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| Authors: | Lou Xiangdong Xia Zhiqing |
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| Institution: | Lou Xiangdong,Xia Zhiqing Department of Chemistry,Henen Normal University,453002,XinxiangShen Hesheng,Shen Yusheng Department of Materials Science and Engineeing University of Science and Technology of china |
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| Abstract: | The ZnO/SnO_2bilayer thin film was prepared by sputtering method,The targets weremade of pure SnO_2and ZnO Powder,The bilayer was analysis by XPS,SEM,XRD technique,As a resultof the experiments,it was shown that ZnO/SnO_2bilayer gas sensor has better sensitivity and silectivetycompared with the single layer elements,The gas-sensing mechanisms was disscussed brietly. |
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| Keywords: | S_nO_2 ZnO thin tilm sensitivity gas-sensing mechanisms |
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