| 非晶硅薄膜厚度均匀性对其透射光谱的影响 |
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| 引用本文： | 余云鹏,林舜辉,黄翀,林璇英. 非晶硅薄膜厚度均匀性对其透射光谱的影响[J]. 汕头大学学报(自然科学版), 2004, 19(1): 50-54 |
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| 作者姓名： | 余云鹏 林舜辉 黄翀 林璇英 |
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| 作者单位： | 汕头大学物理系,汕头,515063 |
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| 摘 要： | 针对膜厚的均匀性对非晶硅薄膜透射光谱 (40 0～ 1 0 0 0 nm)的影响问题 ,通过模拟计算分析在不同膜厚、厚度 (线性 )变化率和照射面积条件下 ,厚度均匀性对谱线的影响 .结果表明这种影响主要发生在薄膜的无吸收区和弱吸收区 ,表现为峰—峰值变小和振荡周期畸变 .减小照射面积可有效地降低这种影响
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| 关 键 词： | 薄膜 厚度 透射谱 均匀性 |
| 文章编号： | 1001-4217(2004)01-0050-05 |
| 修稿时间： | 2003-09-01 |
Effect of Thickness Homogeneity on Optical Transmittance Spectra of a-Si:H Films |
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| YU Yun-eng,LIN Shun-ui,HUANG Chong,LIN Xuan-ing. Effect of Thickness Homogeneity on Optical Transmittance Spectra of a-Si:H Films[J]. Journal of Shantou University(Natural Science Edition), 2004, 19(1): 50-54 |
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| Authors: | YU Yun-eng LIN Shun-ui HUANG Chong LIN Xuan-ing |
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| Abstract: | In order to investigate the effect of thickness homogeneity of a-Si:H fi lms on optical transmittance spectra,we simulated the spectra(400～1000nm) under different thickness,thickness inhomogeneity and exposure area.The res ults indicated that the influence mainly occurred in transparent zone and weak- absorption zone,which showed the peak-peak values were reduced and vibration pe riod was distorted.However,decrease of exposure area could reduce this influence effectively. |
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| Keywords: | film thickness transmittance spectrum homogeneity |
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