| 超衍射相位板设计 |
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| 引用本文： | 谭又华,肖诗洲,郭锐,王翔,黄文浩.超衍射相位板设计[J].中国科学技术大学学报,2007,37(7):748-752. |
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| 作者姓名： | 谭又华 肖诗洲 郭锐 王翔 黄文浩 |
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| 作者单位： | 中国科学技术大学精密机械与精密仪器系,安徽合肥,230027 |
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| 基金项目： | 国家自然科学基金;国家高技术研究发展计划(863计划);中国科学院院长奖启动基金 |
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| 摘 要： | 对超衍射理论进行了研究和分析,通过利用优化算法设计了对应于横向、纵向,特别是三维超衍射的3种二元相位元件;模拟结果表明在飞秒激光微加工系统中,考虑双光子效应,这种相位元件的超衍射性能尤为理想.讨论了光源的光谱范围对相位元件超衍射效果的影响,结果表明当光谱较窄时,超衍射性能几乎与使用单波长光源时一样.所设计的超衍射相位元件可以应用于飞秒激光加工系统.
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| 关 键 词： | 超衍射 相位元件 激光微加工 优化算法 压缩比 |
| 文章编号： | 0253-2778（2007）07-0748-05 |
| 修稿时间： | 2006-10-132007-04-27 |
Design of superresolved phase plates |
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| TAN You-hua,XIAO Shi-zhou,GUO Rui,WANG Xiang,HUANG Wen-hao.Design of superresolved phase plates[J].Journal of University of Science and Technology of China,2007,37(7):748-752. |
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| Authors: | TAN You-hua XIAO Shi-zhou GUO Rui WANG Xiang HUANG Wen-hao |
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| Institution: | Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of Chino, Hefei 230027, China |
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| Abstract: | Theoretical analysis for superresolution was presented.By employing a special optimization algorithm,three kinds of binary phase plates were proposed to obtain transversal and axial superresolution,especially three-dimensional superresolution.The simulation results demonstrate that the superresolution performances of such kind of phase plates are even better by taking two-photon absorption into consideration in the femtosecond laser micro fabrication system.Moreover,the influence introduced by finite spectral range of the light source was discussed.The results show that the performance of superresolved phase plates using narrow width spectral light source is practically as good as that using single wavelength light source.In conclusion,the designed superresolved phase plates can be successfully applied to a femtosecond laser micro fabrication system. |
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| Keywords: | superresolution phase plate laser micro fabrication optimization algorithm compression ratio |
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