稀土掺杂铝酸锶长余辉薄膜制备方法的研究现状

稀土掺杂铝酸锶薄膜在长余辉夜视照明、无损实时可视化探测、机械应力传感器、纳米光电子器件、二维温度传感器以及薄膜太阳能电池等领域具有极为广阔、诱人的应用前景.要实现以上应用，首要条件是制备出质量高、性能优良的薄膜.因此制备稀土掺杂铝酸锶薄膜成为当今研究的热点.综述了国内外制备稀土掺杂铝酸锶薄膜的主要方法，包括射频磁控溅射法、溶胶-凝胶法、脉冲激光沉积法和激光熔蒸法，并重点介绍了射频磁控溅射法；另外对各种方法的优缺点进行了阐述.

Research Status of Preparation Methods of Long-persistent Thin Films with Rare Earth Mixing Strontium Aluminate

Thin film prepared with rare earth mixing strontium aluminate is a promising candidate for applications in long afterglow night lighting,intact real-time visual detection,mechanical stress sensor,nano-optoelectronic device,two-dimensional temperature sensor and thin-film solar cell.To implement applications mentioned above,preparing thin film of high quality and performance is a must.Hence,preparation of thin films with rare earth mixing strontium aluminate becomes a hot topic.In this paper,the main methods of preparing thin film with rare earth mixing strontium aluminate in world-wide were reviewed,and included the radio frequency magnetron sputtering,sd-gol method,pulsed laser deposition and laser ablation,and the radio frequency magnetron sputtering was mainly introduced.In addition the advantages and disadvantages of different methods were discussed.