Ag雕塑薄膜生长的阴影效应研究

通过引入阴影效应、层内扩散和层间扩散势能,建立了倾斜沉积条件下金属雕塑薄膜生长的三维动力学蒙特卡罗模型。利用该模型模拟了Ag在倾斜沉积实验条件下的生长过程。模拟结果表明,由于阴影效应的加强,薄膜表面随着沉积角的增加明显变得粗糙并长成纳米柱结构。通过改变不同的沉积角,研究了薄膜表面形貌的变化,并统计分析了表明粗糙度随薄膜高度的变化关系,论证了雕塑薄膜生长过程中阴影效应与扩散效应的影响机制。

The research of shadowing effect in Ag sculptured thin film growth*

By introducing shadowing effect, terrace diffusion barrier, and interlayer diffusion barrier, we established a three-dimensional (3D) kinetic Monte Carlo (KMC) simulation for the growth evolution of metal films during glancing angle deposition (GLAD). The growth process of Ag sculptured thin films has been simulated through this KMC model. As the incident angle increases, due to enhanced shadowing effect, the surface roughness of thin film has been demonstrated to increase rapidly and nanorods appear. Under the GLAD conditions, the morphology of the film is determined by the competition process of the diffusion and the self-shadowing effect.