| 基于特殊X射线光刻技术的空心微针制备技术 |
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| 引用本文： | 李以贵,颜 平,黄 远,祝 宁.基于特殊X射线光刻技术的空心微针制备技术[J].上海应用技术学院学报,2015,15(4):384-386. |
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| 作者姓名： | 李以贵 颜 平 黄 远 祝 宁 |
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| 作者单位： | 上海应用技术学院 理学院，上海 201418;上海应用技术学院 理学院，上海 201418;上海应用技术学院 理学院，上海 201418;上海应用技术学院 理学院，上海 201418 |
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| 基金项目： | 上海应用技术学院人才引进基金资助项目(YJ2014-03)；上海应用技术学院重点学科平台资助项目(10210Q140005) |
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| 摘 要： | 介绍了2种基于特殊X射线光刻技术的空心微针制备方法.一种为基于2次不同X射线光刻技术的制备方法,即第1次为通常意义的带掩膜板光刻,第2次为无掩膜板光刻;另一种为基于2次移动掩膜板光刻加1次通常意义的带掩膜板光刻技术的制备空心微针方法.结果表明:在面积为5mm×5mm的聚合物基板上制备了25根空心微针阵列.
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| 关 键 词： | 空心微针 X射线光刻 对准 |
Fabrication of Hollow Micro Needle Array Based on Special X-ray Lithography |
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| LI Yigui,YAN Ping,HUANG Yuan and ZHU Ning.Fabrication of Hollow Micro Needle Array Based on Special X-ray Lithography[J].Journal of Shanghai Institute of Technology: Natural Science,2015,15(4):384-386. |
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| Authors: | LI Yigui YAN Ping HUANG Yuan and ZHU Ning |
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| Abstract: | Two methods for fabricating hollow micro needle arrays were introduced. One method was that fabricating hollow micro needle array based on double X-ray exposures, namely, one was normal X-ray exposure with X-ray mask and the other was X-ray exposure without X-ray mask. The other fabrication method was that hollow micro needle was fabricated by using moving mask X-ray exposures and an alignment X-ray exposure. The feasibilities for the hollow micro needle arrays were demonstrated by fabricating 25 micro needles in a 5x5 mm2 polymer chip. |
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| Keywords: | hollow micro needle X-ray lithography alignment |
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