| 溶胶-凝胶法制备的BaTiO3薄膜表面态 |
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| 引用本文： | 陈海涛,胡界博,娄辉,蔡洪涛,丁玲红,张伟风. 溶胶-凝胶法制备的BaTiO3薄膜表面态[J]. 应用科学学报, 2006, 24(4): 429-432 |
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| 作者姓名： | 陈海涛 胡界博 娄辉 蔡洪涛 丁玲红 张伟风 |
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| 作者单位： | 河南大学物理与信息光电子学院, 河南开封 475001 |
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| 基金项目： | 河南省高校创新人才培养项目 |
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| 摘 要： | 用溶胶-凝胶法和快速退火工艺在SiO2/Si(111)基片上生长了钙钛矿结构BaTiO3薄膜.用X射线光电子能谱技术(XPS)和角分辨X射线光电子能谱技术(ARXPS)研究了薄膜的表面化学态以及最顶层的原子种类和分布状况,结果显示在热处理过程中薄膜表面形成一层富含BaO的非计量钛氧化物层,并且钡-钛原子浓度比随着探测深度的增大而逐渐减小.
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| 关 键 词： | 溶胶-凝胶法 BaTiO3薄膜 ARXPS XPS 表面态 |
| 文章编号： | 0255-8297（2006）04-0429-04 |
| 收稿时间： | 2005-01-28 |
| 修稿时间： | 2005-01-282005-06-13 |
Surface States of Sol-gel Derived BaTiO3 Thin Films |
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| CHEN Hai-tao,HU Jie-bo,LOU Hui,CAI Hong-tao,DING Ling-hong,ZHANG Wei-feng. Surface States of Sol-gel Derived BaTiO3 Thin Films[J]. Journal of Applied Sciences, 2006, 24(4): 429-432 |
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| Authors: | CHEN Hai-tao HU Jie-bo LOU Hui CAI Hong-tao DING Ling-hong ZHANG Wei-feng |
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| Affiliation: | School of Physics and Information Optoelectronics, Henan University, Kaifeng 475001, China |
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| Abstract: | Perovskite BaTiO_3 thin films were grown on SiO_2/Si(111) substrates by a sol-gel process and rapid thermal annealing(RTA).Surface states and the topmost surface atoms of the BaTiO_3 thin films were analyzed by X-ray photoelectron spectroscopy(XPS) and angle-resolved X-ray photoelectron spectroscopy(ARXPS).The results show that the as-fired BaTiO_3 thin films have an enriched-BaO nonstoichiometric surface layer that can be removed by A~ _r ion sputtering,and the atomic ratio of Ba to Ti decreases with a decreasing depth from the film surface. |
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| Keywords: | sol-gel process BaTiO_3 thin film surface state XPS ARXPS |
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