| 微电子领域磁悬浮进给机构设计 |
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| 引用本文： | 韩连英,孙宝玉,梁淑卿,刘虹.微电子领域磁悬浮进给机构设计[J].吉林工学院学报,2003,24(4):65-68. |
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| 作者姓名： | 韩连英 孙宝玉 梁淑卿 刘虹 |
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| 作者单位： | 长春工业大学机电工程学院，长春工业大学机电工程学院，长春工业大学机电工程学院，长春工业大学机电工程学院 吉林 长春 130012，吉林 长春 130012，吉林 长春 130012，吉林 长春 130012 |
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| 基金项目： | 吉林省科技厅科学基金资助项目(吉科合字第20020621号) |
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| 摘 要： | 设计了一种集磁悬浮技术和线性驱动技术为一体的微电子设备用进给机构。此机构采用直线同步电机，对悬浮的平台进给机构提供驱动力，实现了平台进给机构在水平和垂直两方向的无接触支撑和导向。文中对磁悬浮平台进给机构产生的悬浮力和直线电机产生的推力进行了分析计算。此进给机构具有响应速度快、刚度高以及定位精确的特点，能够满足微电子设备高精度、高效率和超洁净加工的需要。
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| 关 键 词： | 线性驱动 磁悬浮技术 进给机构 直线同步电机 数字PID控制 |
| 文章编号： | 1006-2939(2003)04-0065-04 |
| 修稿时间： | 2003年5月28日 |
The Design of a Magnetic Suspended Feeder in the Field of Microelectronic Manufacturing |
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| HAN Lian-ying,SUN Bao-yu,LIANG Shu-qing,LIU Hong.The Design of a Magnetic Suspended Feeder in the Field of Microelectronic Manufacturing[J].Journal of Jilin Institute of Technology,2003,24(4):65-68. |
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| Authors: | HAN Lian-ying SUN Bao-yu LIANG Shu-qing LIU Hong |
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| Abstract: | A new precision positioning stage is designed with the adoption of both magnetic suspension and linear drive technology which employs a linear synchronous motor as to avoid friction, elastic distortion, hysteresis and non-linear errors. The mechanism can achieve non-contact support and guidance in the horizontal and vertical directions. The magnetic suspension force and the thrusting force produced by the linear motor were analyzed and calculated. The application of linear drive technology in the driving mechanism makes the system can respond quickly and be positioned accurately. With the characteristics of high stiffness, quick response and precise positioning, the driving mechanism can meet the needs of high accuracy and high efficiency under super-clean conditions in the field of micro-electronic manufacturing. |
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| Keywords: | linear drive magnetic suspension technology feeder linear synchronous motor digital PID control |
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