氮化硅陶瓷添加剂和制备工艺的研究进展

随着对氮化硅陶瓷研究的不断深入，其热学性能、介电性能有了极大的改善，使之可应用在电子器件等领域。总结了制备氮化硅陶瓷材料所使用的烧结助剂，包括氧化物烧结助剂、非氧化物烧结助剂和其他烧结助剂；比较了氮化硅陶瓷材料的烧结方式，包括热压烧结、气压烧结、放电等离子烧结、无压烧结和反应烧结；论述了与氮化硅相关的复合材料的研究进展；展望了氮化硅陶瓷材料研究的发展趋势。

Research Progress of Additives and Preparation Process of Silicon Nitride Ceramic

With the continuous research on silicon nitride ceramics, its thermal and dielectric properties have extremely fast improvement, which makes it applicable to the field of electronic devices. The sintering aids used in the preparation of silicon nitride ceramic materials are summarized, including oxide sintering aids, non-oxide sintering aids and other sintering aids. The sintering methods of silicon nitride ceramic materials are compared, including hot pressing sintering, gas pressure sintering, spark plasma sintering, pressureless sintering and reaction sintering. The research progress of silicon nitride-related composite materials is discussed. The development trend of silicon nitride ceramic materials research is prospected.