| Nd:YAG脉冲激光诱导化学沉积银 |
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| 引用本文： | 孙克,赵岩,张彩碚,李正林.Nd:YAG脉冲激光诱导化学沉积银[J].东北大学学报(自然科学版),2002,23(4):391-393. |
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| 作者姓名： | 孙克 赵岩 张彩碚 李正林 |
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| 作者单位： | 东北大学理学院;中国科学院金属研究所;东北大学理学院;中国科学院金属研究所辽宁沈阳110004;辽宁沈阳110016;辽宁沈阳110004;辽宁沈阳110016 |
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| 基金项目： | 国家重点基础研究发展规划项目 (G2 0 0 0 0 672 0 5 4) |
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| 摘 要： | Nd:YAG脉冲激光扫描照射单晶Si基底表面AgNO3薄膜,薄膜热分解产生的Ag沉积在Si基底表面形成沉积线·在激光功率为28W,频率为35Hz时,最高扫描速度为9mm/s·SEM显示Ag颗粒均匀镶嵌在基底沉积线表面,AES研究沉积线表面元素随深度分布情况·以Ag颗粒为催化中心,在沉积线表面选区化学镀铜,超声振动显示镀铜膜与基底有良好的结合力·简单分析了沉积线表面Ag颗粒形状及表面凹坑出现的原因
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| 关 键 词： | Nd:YAG脉冲激光 激光诱导化学沉积 选区化学镀 Si基底 |
| 文章编号： | 1005-3026(2002)04-0391-03 |
| 修稿时间： | 2001年6月29日 |
Pulsed Nd:YAG Laser Induced Chemical Deposition of Ag |
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| SUN Ke ,ZHAO Yan ,ZHANG Cai bei ,LI Zheng lin.Pulsed Nd:YAG Laser Induced Chemical Deposition of Ag[J].Journal of Northeastern University(Natural Science),2002,23(4):391-393. |
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| Authors: | SUN Ke ZHAO Yan ZHANG Cai bei LI Zheng lin |
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| Abstract: | Pulsed Nd:YAG laser was used to irradiate AgNO 3 film on Si substrate,AgNO 3 pyrolyzed by laser energy gives out Ag particles. The particles deposit on Si substrate and form Ag deposited line. The top scanning speed is 9?mm/s when the laser average power equals 2 8?W and the laser frequency equals 35?Hz. SEM shows that Ag particles are evenly inlaid along the deposited lines on Si substrate. AES analyzed the elements distribution with depth on the surfaces of deposited lines. Selected area electroless plating of copper was obtained on Ag deposited lines. The copper film exhibits good adhesion to Si substrate after long time ultrasonic vibration. The formation mechanics of sphere shaped Ag particles and dent areas on the irradiated lines were also simply discussed. |
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| Keywords: | pulsed Nd:YAG laser laser induced chemical deposition selected area electroless plating Si substrate |
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