| 硅微尖上金刚石膜的生长 |
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| 引用本文： | 元光,金亿鑫,金长春,宋航,张宝林,宁永强,蒋红,周天明,李树伟.硅微尖上金刚石膜的生长[J].吉林大学学报(理学版),1996(3). |
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| 作者姓名： | 元光 金亿鑫 金长春 宋航 张宝林 宁永强 蒋红 周天明 李树伟 |
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| 作者单位： | 中国科学院长春物理研究所 |
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| 摘 要： | 采用微波等离子体方法在硅微尖上生长了金刚石膜，并利用ＳＥＭ和Ｘ射线衍射方法对金刚石膜进行了研究．
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| 关 键 词： | 硅微尖，场发射，金刚石膜生长 |
Studies of Diamond Film on the Silicon Tips Array |
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| Yuan Guang, Jin Yixin, Jin Changchun, Song Hang, Zhang Baolin,Ning Yongqiang, Jiang Hong, Zhou Tianming, Li Shuwei,.Studies of Diamond Film on the Silicon Tips Array[J].Journal of Jilin University: Sci Ed,1996(3). |
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| Authors: | Yuan Guang Jin Yixin Jin Changchun Song Hang Zhang Baolin Ning Yongqiang Jiang Hong Zhou Tianming Li Shuwei |
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| Abstract: | The diamond film on the silicon tips array was deposited by MW-PCVD technique. The samples obtained were investigated by SEM and X-ray diffraction technique. It is shown that the diamond film is (111) oriented. |
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| Keywords: | silicon tips field emission diamond film growth |
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