| 光纤探针式表面粗糙度测量仪实验研究 |
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| 引用本文： | 金杰,李奕,曾祥烨.光纤探针式表面粗糙度测量仪实验研究[J].南开大学学报,2005,38(1):49-52. |
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| 作者姓名： | 金杰 李奕 曾祥烨 |
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| 作者单位： | 天津大学,电子信息工程学院,天津,300072;河北工业大学,电子信息工程系,天津,300130 |
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| 基金项目： | 天津市重点自然基金
国际合作项目资助(033800211) |
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| 摘 要： | 本文介绍了一种光纤探针式表面粗糙度测量仪,它集现有接触式和非接触式表面粗糙度测量仪优点 于一身,能满足表面粗糙度测量的高精度要求.本文阐述了此种测量仪的工作原理,说明了各部分的主要功能, 并给出了光纤探头部分的具体设计,最后分析了实验结果.
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| 关 键 词： | 表面粗糙度 光纤探针 激光 |
| 文章编号： | 0465-7942(2005)01-0049-04 |
| 修稿时间： | 2004年2月10日 |
Experiment and Research on Instrument for Measurement of Surface Routhness by Fiber Probe |
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| Li Yi,Jin Jie,Zeng Xiangye.Experiment and Research on Instrument for Measurement of Surface Routhness by Fiber Probe[J].Acta Scientiarum Naturalium University Nankaiensis,2005,38(1):49-52. |
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| Authors: | Li Yi Jin Jie Zeng Xiangye |
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| Abstract: | This paper introduces a kind of instrument for measurement of surface roughness by fiber probe. It gathers the strongpoint of contact and non-contract instruments for measurement of surface roughness by fiber probe now. It also satisfies the high-precision demand for measurement of surface roughness. This paper expatiates the working principle of this kind of instrument, explains the main function of each part and the concrete design of fiber probe. In the end, it analyzes the result of this experiment. |
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| Keywords: | surface roughness fiber probe laser |
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