EB-PVD制备ZrO2涂层的微观组织结构研究

采用电子束物理气相沉积法在不锈钢基体上制备了氧化钇部分稳定氧化锆陶瓷涂层。利用XRD、XPS、SEM、AFM对涂层的相结构、化学成分、表面形貌进行了实验分析。结果表明,氧化锆涂层为四方相氧化锆,并不同程度存在织构现象。随着基体温度的升高,涂层中的晶粒尺寸在逐渐长大。涂层表面的小颗粒为柱状晶的上表面,涂层表面的粗糙度随着靶基距的升高而变小。涂层表面Zr-O结合态为Zr4+,而涂层内部存在少量的缺氧现象。

Study on Microstructure of ZrO2 Coatings Prepared by EB-PVD Technology

Yttria partial stabilized zirconia ceramic coating was prepared on the matrix of stainless steel by electron-beam physical vapor deposition (EB-PVD) in this paper, and then The coating phase structure and chemical composition were analyzed by X-ray Diffraction (XRD) and X-ray Photoelectron Spectroscopy (XPS) respectively; the coating surface topography was observed by Scanning Electron Microscopy (SEM) and Atom Force Microscopy (AFM). The results show that the coating produced by EB-PVD was Tetragonal phase zirconia with different texture. Size of grain increased with the matrix elevating temperature. The little grain on the coating surface was determined to be the upper surface of columnar crystal, and the roughness of the coating surface diminished with increasing distance between the target and the substrate. The binding state of top surface Zr-O was Zr4 , and oxygen-absence was discovered in the internal coating.