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内外环电容传感器空间灵敏度特性
引用本文:叶佳敏,张涛,周力普.内外环电容传感器空间灵敏度特性[J].天津大学学报(自然科学与工程技术版),2008,41(12):1498-1504.
作者姓名:叶佳敏  张涛  周力普
作者单位:天津大学电气与自动化工程学院天津市过程检测与控制重点实验室,北京大学软件与微电子学院
基金项目:国家高技术研究发展计划(863计划) 
摘    要:为了设计应用于两相流相关流速测量的电容传感器,研制了一种新型的内外环电容传感器,利用有限元仿真的方法对内外环电容传感器的轴向灵敏度、空间滤波特性以及时间频率响应3个空间灵敏度特性指标做了定量分析.结果显示,内外环电容传感器的轴向灵敏度曲线近似于高斯分布,而电极宽度的变化会引起轴向灵敏度峰值的改变,当电极宽度为20mm时,轴向灵敏度峰值最大;内外环电容传感器相当于一个低通滤波器,电极宽度增加,空间频带变窄,同时时间频带也变窄.

关 键 词:内外环电容传感器  传感器设计  轴向灵敏度  空间滤波特性  时间频率响应

Spatial Sensitivity Characteristis of Inner and Outer Ring Capacitance Sensor
YE Jia-min,ZHANG Tao,ZHOU Li-pu.Spatial Sensitivity Characteristis of Inner and Outer Ring Capacitance Sensor[J].Journal of Tianjin University(Science and Technology),2008,41(12):1498-1504.
Authors:YE Jia-min  ZHANG Tao  ZHOU Li-pu
Institution:YE Jia-min, ZHANG Tao, ZHOU Li-pu ( 1.Tianjin Key Laboratory of Process Measurement and Control, School of Electrical Engineering and Automation, Tianjin University, Tianjin 300072, China; 2.School of Software and Microelectronics, Peking University, Beijing 102600, China)
Abstract:In order to design the capacitance sensor used in the measurement of cross-correlation flow rate in the two-phase flow, a new style inner and outer ring capacitance sensor was developed. Three spatial sensitivity characteristic indices, i.e. the axial sensitivity, spatial filtering effect and temporal frequency response characteristics were analyzed quantitatively by using the finite element analysis software. The analysis results show that the axial sensitivity curve of inner and outer ring capacitance sensor is approximately of Gaussian distribution; the peak of the axial sensitivity curve will change with the width of the electrode and the maximum value of the peak is obtained when the width of the electrode is 20 mm; the inner and outer capacitance sensor is equivalent to a low-pass filter the spatial frequency bandwidth and the temporal frequency bandwidth both become narrow with the increase of the electrode width.
Keywords:inner and outer ring capacitance sensor  sensor design  axial sensitivity  spatial filtering effect  temporal frequency response
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