| 用点渲染算法实现光刻胶显影过程的三维模拟 |
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| 引用本文： | 崔滨,万旺根,吴永亮,金龙存,杨晓东.用点渲染算法实现光刻胶显影过程的三维模拟[J].应用科学学报,2009,27(4):375-380. |
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| 作者姓名： | 崔滨 万旺根 吴永亮 金龙存 杨晓东 |
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| 作者单位： | 上海大学通信与信息工程学院，上海200072 |
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| 基金项目： | 国家自然科学基金，国家高技术研究发展计划(863计划)，the Shanghai's Key Discipline Development Program，In novation Foundation for Graduate Student of Shangahai University |
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| 摘 要： | 用顶点和面片三维显示光刻胶显影模拟结果的方法不支持海量数据. 为此提出基于层次结构的三维场景绘制点渲染算法，并引入网格插值法填补显影模拟中在光刻胶表面出现的空洞，用Dill算法、Kim模型和介质光线算法建立光刻显影模型. 实验结果表明，该方法能高效、精确、实时地绘制光刻显影模型输出的大规模海量数据.
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| 关 键 词： | 点渲染 光刻显影 层次细节结构 |
| 收稿时间： | 2008-09-01 |
| 修稿时间： | 2009-02-25 |
Simulation of Point Based Rendering for Three Dimensional Lithography Development |
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| CUI Bin,WAN Wang-gen,WU Yong-liang,JIN Long-cun,YANG Xiao-dong.Simulation of Point Based Rendering for Three Dimensional Lithography Development[J].Journal of Applied Sciences,2009,27(4):375-380. |
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| Authors: | CUI Bin WAN Wang-gen WU Yong-liang JIN Long-cun YANG Xiao-dong |
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| Institution: | School of Communication and Information Engineering, Shanghai University, Shanghai 200072, China |
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| Abstract: | Simulation results are presented with vertices and polygons which did not adequately support display of complex scenes of point-cloud data when using traditional methods. Thus we use a hierarchical point-based representation algorithm for rendering, and introduce a mesh-interpolation algorithm to fill the gaps in the advance of the surface. Meanwhile, a model for lithography development based on the Dill algorithm, the Kim model and the ray algorithm is established. Experimental results show that the hierarchical point-based rendering algorithm is effective for the real-time realization of large-scale 3D visualization. |
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| Keywords: | point based rendering lithography development level of detail hierarchy |
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