| 圆光栅细分误差的动态测量 |
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| 引用本文： | 方银东,戴兴庆.圆光栅细分误差的动态测量[J].上海理工大学学报,1989(3). |
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| 作者姓名： | 方银东 戴兴庆 |
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| 作者单位： | 上海机械学院仪器仪表学院
(方银东)，上海机械学院仪器仪表学院(戴兴庆) |
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| 摘 要： | 本文讨论了圆光栅细分误差及其测量,提出了不采用高精度标准件的圆光栅细分误差测量法——时间平均法,并通过实际测试结果证明了时间平均法的可行性。
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| 关 键 词： | 光栅刻划 平均误差 动态测量 时间间隔平均法 |
The Dynamic Measurement of Subdivision Error of Circular Grating |
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| Fang Yindong Dai Xingqing.The Dynamic Measurement of Subdivision Error of Circular Grating[J].Journal of University of Shanghai For Science and Technology,1989(3). |
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| Authors: | Fang Yindong Dai Xingqing |
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| Institution: | Fang Yindong Dai Xingqing |
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| Abstract: | This paper deals with subdivision error of circular grating and its measurement. A new method, time interval averaging method(TIAM), is proposed in which no highly precise standard apparatus is used.The experiments demonstrate the feasibility of TIAM. |
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| Keywords: | Grating ruling Mean error Dynamic measurement Time interal averaging method |
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