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Effects of deposition parameters on the properties of VO2 thin films |
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| Authors: | WANG Lixi LI Jianping GAO Xiaoguang HE Xiuli |
| Affiliation: | State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China |
| Abstract: | |
| Keywords: | vanadium dioxide temperature coefficients of resistivity oxygen partial pressure RF reactive sputtering |
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