薄膜式压力传感器温度特性的研究

本文给出了薄膜式压力传感器在膜片非张紧情况下的力学模型,并在此基础上用瑞次(W Ritz)法导得膜片中心的轴向位移方程.在考虑了膜片与垫片不同材料的热力学及弹性参数的情况下,获得了膜片推动压力与温度的关系.按照上述关系计算的结果与实验数据符合良好.利用作者导出的公式在预测传感器特性时,仅需很少的实测工作量.

A Study on Temperature Performance of Diaphragm Type Pressure Sensors

The diaphragm type pressure sensor is one of the highly sensitive and precise pressure balance sensors used for detecting the pressure difference between a sample and the fluid of pressure transmission in the pressure measuring system of a fluid test installation. When the screws are tightened, the center of the non-pretensioned diaphragm will go upward, provided that on the upper side of the diaphragm there is a gasket seal. It will make contact with the electrode located at the center of the upper flange. A mechanical model based on the above-mentioned action is suggested and an equation for the axial displacement of the diaphragm center is derived using the Ritz method. The temperature performance, or the relationship between the pressure and the temperature when the diaphragm is separated from the electrode can be obtained, provided that the effect of temperature on the thermophysical properties of diaphragm material has been taken into consideration. This approach can be used for performance prediction of the diaphragm detector, whether the seal material used is the same as those used for the other parts of the detector or not. Calculation results are found to be in good agreement with experimental data obtained.