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掺杂量对ZnO∶Tb复合薄膜的形貌和光学性能的影响
引用本文:王莹,张瑞玲.掺杂量对ZnO∶Tb复合薄膜的形貌和光学性能的影响[J].河南科学,2007(3).
作者姓名:王莹  张瑞玲
作者单位:商丘职业技术学院 河南商丘476000
基金项目:国家自然科学基金项目(50223036)
摘    要:采用的两步法——先溅射成膜,后退火处理的工艺成功制备了ZnO:Tb复合薄膜,结合XRD、SEM、PL等手段研究了掺杂量对薄膜结构和形貌的影响.发现掺杂量为4.16%时,ZnO:Tb薄膜表面形成新奇T-A-ZnO结构以及不同直径和长度的螺纹状纳米棒;同时出现378 nm和387 nm两个较强的紫外发光峰,以及中心波长位于515 nm的强绿光峰.

关 键 词:掺杂量  ZnO:Tb复合薄膜  形貌  光学性能

The Influence of Annealing Temperature on the Structure and Morphology of ZnO∶Tb Thin Film
WANG Ying,ZHANG Rui-ling.The Influence of Annealing Temperature on the Structure and Morphology of ZnO∶Tb Thin Film[J].Henan Science,2007(3).
Authors:WANG Ying  ZHANG Rui-ling
Abstract:A two steps route to obtain 3D ZnO structures by annealing treatment of the sputtered ZnO∶Tb thin films was report.The influence of dopant content on the structure and morphology of ZnO∶Tb thin films on Si substrate was investigated.And we found that a special tetrapod-aiguille-ZnO structure(T-A-ZnO)together with screw-like nanorods has been formed on ZnO∶Tb thin films with.4.16 % Tb dopant..The PL spectrum of the film with the special structure is featured with two UV emission peaks(at 378 and 387 nm)and a strong green emission band(centered at 515 nm).
Keywords:dopent content  ZnO∶Tb thin film  morphology  optical property
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