| 谐振式微加速度计驱动和检测结构设计及制作 |
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| 引用本文： | 何高法,唐一科,周传德,何晓平,吴英.谐振式微加速度计驱动和检测结构设计及制作[J].重庆大学学报(自然科学版),2009,32(9):997-1001. |
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| 作者姓名： | 何高法 唐一科 周传德 何晓平 吴英 |
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| 作者单位： | 重庆大学机械工程学院;重庆科技学院机械系;中国工程物理研究院电子工程研究所; |
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| 基金项目： | 国家自然科学基金资助项目(60876088) |
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| 摘 要： | 基于谐振式加速度计的工作原理和结构特点,设计了一种新型微加速度计谐振器,用解析法和有限元法计算了谐振器的横向驱动力以及其处于谐振状态时的检测电容值。综合粘性阻尼、运动阻尼和气膜阻尼,分析了谐振器在大气环境下的阻尼和品质因子。应用MEMS(microelectromechanical system)工艺,完成了微加速度计谐振器的制作。测试结果表明:谐振器性能良好,谐振频率为54523.5 Hz,与设计的理论值误差约为13.6%。
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| 关 键 词： | 微机电系统 加速度计 谐振器 静电梳齿 |
| 收稿时间： | 4/2/2009 12:00:00 AM |
Design and fabrication of a novel resonator for resonant accelerometer |
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| HE Gao f,TANG Yi ke,ZHOU Chuan de,HE Xiao ping and WU Ying.Design and fabrication of a novel resonator for resonant accelerometer[J].Journal of Chongqing University(Natural Science Edition),2009,32(9):997-1001. |
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| Authors: | HE Gao f TANG Yi ke ZHOU Chuan de HE Xiao ping and WU Ying |
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| Institution: | 1.College of Mechanical Engineering;Chongqing University;Chongqing 400030;P.R.China;2.Department of Mechanical Engineering;Chongqing University of Science and Technology;Chongqing 401331;3.Institute of Electronic Engineering;China Academy of Engineering Physics;Mianyang 621900;Sichuan;P.R.China |
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| Abstract: | A novel resonator for accelerometer with sensing and actuating combs was designed and fabricated based on micro-electromechanical system(MEMS) process.Driving force and demand voltage of the resonator were analyzed by analytical method and Finite-Element Method(FEM).Sensing capacitance on resonance state and Q-factor under atmosphere was calculated by these two methods.The micro-fabrication process was planned and realized using MEMS(Micro-electromechanical System) method.The testing results show the perfor... |
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| Keywords: | micro-electromechanical system accelerometer resonator electrostatic comb |
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