Al—Ge共蒸膜晶化过程的计算机模拟

本文对Al—Ge共蒸膜中分形晶化的过程进行了计算机模拟研究。结果表明:分形晶化过程中晶核长大效应明显影响分形体结构。在较高Ge原子百分比共蒸膜中晶化时释放出的较多的晶化潜热以及在较高的退火温度时具有的较高热激活能都促使晶核长大。

Simulation of Crystallization Processes in Co-sputtered Al-Ge films

In this study.we simulate the fractal crystallization processes in co-sputtered Al-Ge films by use of computer. The results indicate that the growth effect of nuclei strongly influences the fractal structure during crystallization. The latent heat released by crystallization in co-sputtered films with higher Ge at % and the heat activation energy at higher annealing temperature may promote the growth of nuclei