| 用直线四探针头测量金属-半导体的接触电阻率 |
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| 引用本文： | 陈存礼,华文玉.用直线四探针头测量金属-半导体的接触电阻率[J].应用科学学报,1989,7(1):61-64. |
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| 作者姓名： | 陈存礼 华文玉 |
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| 作者单位： | 1. 南京大学;2. 华东工学院 |
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| 摘 要： | 本文提出一种用直线四探针头测量金属-半导体欧姆接触接触电阻率的简捷方法.导出了适用于薄层半导体材料的接触电阻率表达式,经实验验证结果与线性传输线模型一致.
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| 关 键 词： | 直线四探针头 金属－半导体 电阻率 |
| 收稿时间： | 1987-05-17 |
| 修稿时间： | 1987-09-24 |
THE MEASUREMENT OF SPECIFIC CONTACTRESISTANCE OF M-S BY PROBE HEADSOF THE IN-LINE FOUR PROBES |
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| CHEN CUNLI,HUA WENYU.THE MEASUREMENT OF SPECIFIC CONTACTRESISTANCE OF M-S BY PROBE HEADSOF THE IN-LINE FOUR PROBES[J].Journal of Applied Sciences,1989,7(1):61-64. |
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| Authors: | CHEN CUNLI HUA WENYU |
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| Institution: | 1. Nanjing University;2. East China Institute of Technology |
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| Abstract: | In this paper, a simple method to measure the specific contact resistance of metal-semiconductor ohmic contact is developed, using the probe heads of the inline four probes. The equations to measure the specific contact resistance for a thin semiconductor layer have been derived. The experimental results are in good agreement with the in-line geometry transmission line model. |
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