| CVD方法制备Mo2C膜的化学反应机制和组分含量的热力学计算 |
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| 引用本文： | 平荣刚,吕弋.CVD方法制备Mo2C膜的化学反应机制和组分含量的热力学计算[J].西南师范大学学报(自然科学版),1999,24(3):284-289. |
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| 作者姓名： | 平荣刚 吕弋 |
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| 作者单位： | 1. 西南师范大学物理系,重庆,400715
2. 西南师范大学化学化工学院,重庆,400715 |
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| 摘 要： | 报道了采用ＣＶＤ方法制备Ｍｏ２Ｃ膜的方法，在实验上证实了Ｍｏ２Ｃ膜的化学反应机制包括Ｍｏ（ＣＯ）６的分解和Ｍｏ的碳化两个过程，根据自由能极小原理对薄膜中各组分的含量与沉积温度的关系作了计算，计算值的变化趋势与测量值基本一致
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| 关 键 词： | Mo_2C膜 反应机制 组分含量 |
The reactive mechanism for Mo2C thin film prepared by CVD and calculation of composition |
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| Ping Ronggang,Lu Yi.The reactive mechanism for Mo2C thin film prepared by CVD and calculation of composition[J].Journal of Southwest China Normal University(Natural Science),1999,24(3):284-289. |
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| Authors: | Ping Ronggang Lu Yi |
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| Abstract: | The preparation of Mo 2C thin film is reported and its reactive mechanism which includes decomposition of molybdenum hexacarbonyl and carbonization of molybdenum is corroborated experimentally.The variation of molar ratio composition with deposited temperature is calculated based on principle of minimization of Gibbs free energy and the calculated values are consisted with measured ones appropriately. |
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| Keywords: | Mo 2C thin film reactive mechanism mole ratio composition |
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