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YAG激光辐照下单晶硅表面结构变化的研究
引用本文:许丽,黄伟其.YAG激光辐照下单晶硅表面结构变化的研究[J].贵州大学学报(自然科学版),2007,24(3):261-264.
作者姓名:许丽  黄伟其
作者单位:贵州大学,贵州省光电子技术与应用重点实验室,贵州,贵阳,550025
摘    要:将功率为实20~30W、波长为1064nm的YAG激光束照射在硅样品表面打出小孔,在孔内的侧壁上有特殊的网孔状结构。从分析激光与硅材料相互作用的原理来解释孔内侧壁上网孔状结构形成的原理。通过优化激光加工的条件,使我们获得了稳定的低维量子结构的和较强发光的样品。

关 键 词:激光辐照  纳米网孔壁  等离子体波
文章编号:1000-5269(2007)03-0261-04
修稿时间:2007-03-15

Study of the Surface Structure of the silicon silicon nanocrystal During Laser Irradiation
XU Li,HUANG Wei-qi.Study of the Surface Structure of the silicon silicon nanocrystal During Laser Irradiation[J].Journal of Guizhou University(Natural Science),2007,24(3):261-264.
Authors:XU Li  HUANG Wei-qi
Institution:Photoelectron Technology and Application Lab. , Guizhou University, Guiyang 550026 China
Abstract:A kind of hole-net structure can be formed in the wall of the hole on silicon sample irradiated with laser of power 20~30W and wavelength 1064nm.Analyzing theory of interaction between laser and silicon,we propose plasma wave model.We use plasma wave model to explain Mechanism of hole-net structure formed.Under the optimum conditions in preparing,we obtain sample which have stabile low-dimensional structure and enhancing effect of PL emission.
Keywords:laser irradiation  hole-net nanostructure  plasma wave
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