微机械构件间和微操作过程中的力及影响因素分析

根据微机械中构件与构件、微操作中操作工具与操作对象在执行功能动作时的相互作用关系特点,以及微观情况下微观力与构件间距及特征尺寸之间的负幂关系特点,将其简化成3种常见的作用关系模型,即平板与平面（半空间）基体、球与平面（半空间）基体和球与球基体,然后基于该模型,分析了微构件间和微操作过程中的微观力,推导了部分力的计算公式.同时,对诸如表面形貌、介质以及材料等力的影响因素进行了研究,结果表明微构件的表面形貌对微观力的影响最为显著.

Analysis of Micro-forces between Micro-parts and Their Infulence Factors in MEMS and Micro-manpiulation

According to the interaction relationships between the micro-parts in MEMS, and the manipulation tools and the micro-objects in micro-manipulation, three models are simplified to represent these interaction relationships firstly, with which the negative-power law relationship characteristics of micro-forces between the micro-parts and their distance are reflected. Then based on these models, the micro-forces are analyzed and formuhed. Finally, the influence factors of the micro-forces, such as surface condition, media and constitutive material of the micro-parts are discussed. The result shows that the surface condition is the most important factors in determination of the micro-forces. An influence c~fficient of surface roughness is introduced, which facilitates the analysis of the influence of surface condition on micro-forces.