| 电子束曝光机工件台结构的设计研究 |
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| 引用本文： | 赵立人,顾书偃,佟玉环,徐丰仁.电子束曝光机工件台结构的设计研究[J].清华大学学报(自然科学版),1990(5). |
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| 作者姓名： | 赵立人 顾书偃 佟玉环 徐丰仁 |
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| 作者单位： | 精密仪器及机械学系
(赵立人，顾书偃，佟玉环)，精密仪器及机械学系(徐丰仁) |
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| 摘 要： | 根据激光定位光栅扫描电子束曝光机工件台具有的特点，设计了ｘ向用静压气浮导轨结构，实现快速扫描；ｙ向采用机械滚珠导轨，满足间歇步进运动，即走一步、停一段时间再走一步、为保证在高速运动下的稳定性，将机械驱动系统、激光测量和计算机组成一个闭环控制系统，利用计算机不断采样叠代，选择合适的校正系数适时校正，实现了快速运动精确达到预定位置。采用双频激光高精度测量定位，从误差分析出发，对结构进行了改善，保证了最终精度。
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| 关 键 词： | 激光干涉定位工件台 电子束曝光机 光栅扫描 |
Design and Study of the Stage Structure of the Electron Beam Exposure System |
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| Zhao Liren,Gu Shuyan,Tong Yuhuan,Xu Fengren.Design and Study of the Stage Structure of the Electron Beam Exposure System[J].Journal of Tsinghua University(Science and Technology),1990(5). |
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| Authors: | Zhao Liren Gu Shuyan Tong Yuhuan Xu Fengren |
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| Institution: | Department of Precision Instruments and Mechanolgy |
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| Abstract: | This paper discribes the structural features of the Laser interferoinetric positioning stage satisfying specific needs of raster scanning E-beam exposure system. An aerostatic air bearing is designed to realize the high speed scanning motion of the stage in x direction. A ball bearing is designed to realize the stepping motion of the stage in y derection. To ensure the stability and positioning accuracy under high speed motion, a closed-loop control system consisting of a mechanical system, laser interferometer and computer is developed.The computer is used for selecting proper correetive factor by sampling and reiterative method to realize real-time correction of linear system.High accuracy in the stage positoning measurement is obtained by utilizing Doppler effect of double frequency laser interferometry. Accurate position can be reached in a predetermined area. Error analysis of stage structure design ensures the final accuracy of the stage. |
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| Keywords: | laser interferometric positioning stage electron beam exposure machine raster scan |
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