| Experimental and Theoretical Study of Young Modulus in Micromachined Polysilicon Films |
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| 作者姓名： | 丁建宁 孟永钢 温诗铸 |
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| 作者单位： | DING Jianning，MENG Yonggang，WEN Shizhu State Key Laboratory of Tribology，Department of Precision Instruments and Mechanology，Tsinghua University，Beijing 100084，China |
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| 基金项目： | Supported by the Doctoral Science Foundation of China(No.2 0 0 0 0 0 0 338) |
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| 摘 要： | IntroductionThe development of microelectromechanicalsystems (MEMS) has achieved impressiveprogress with many new designs that couldpotentially lead to another industrial revolution.However,the long- term durability of the MEMSdevices,which requires a fun…
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Experimental and Theoretical Study of Young Modulus in Micromachined Polysilicon Films |
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| DING Jianning,MENG Yonggang,WEN Shizhu State Key Laboratory of Tribology.Experimental and Theoretical Study of Young Modulus in Micromachined Polysilicon Films[J].Tsinghua Science and Technology,2002,7(3). |
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| Authors: | DING Jianning MENG Yonggang WEN Shizhu State Key Laboratory of Tribology |
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| Institution: | DING Jianning,MENG Yonggang,WEN Shizhu State Key Laboratory of Tribology,Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China |
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| Abstract: | The elastic modulus is a very important mechanical property in micromachined structures. Several design issues such as resonant frequencies and stiffness in the micromachined structures are related to the elastic modulus. In addition, the accuracy of results from finite element models is highly dependent upon the elastic modulus. In this study, the Young modulus of micromachined thin polysilicon films has been investigated with a new tensile test machine using a magnetic-solenoid force actuator with linear response, low hysteresis, no friction and direct electrical control. The tensile test results show that the measured average value of Young modulus for a typical sample, (164±1.2) GPa, falls within the theoretical bounds of the texture model. These results will provide more reliable design of polysilicon microelectromechanical systems (MEMS). |
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| Keywords: | Young modulus microelectromechanical systems (MEMS) polysilicon |
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