薄膜压力传感器的研究进展

物联网产业的发展使传感器的研究得到越来越多的重视。薄膜压力传感器作为传感器的一个重要分支，因其优异的性能得到广泛的使用。简要地介绍了薄膜压力传感器的组成及原理，详细介绍了不同种类材料制成薄膜压力传感器的特点，重点突出了不同合金材料、半导体材料制成的传感器之间性能的差异，并为电阻层材料的选取提供参考意见。通过总结薄膜的制备方法，来阐述在薄膜压力传感器中薄膜的制备技术，总结近年在薄膜制备技术上进行的研究，最后基于近年纳米材料、微电子机械系统（micro-electro-mechanical systems，MEMS）技术、微波技术等技术的发展，结合薄膜压力传感器的研究现状，对其未来的发展进行展望。

Research Progress of Thin Film Pressure Sensors

With the development of the internet of things industry, more and more attention has been paid to the research of sensors. As an important branch of sensors, thin film pressure sensors have been widely used owning to their excellent performances. The composition and principle of thin film pressure sensors are briefly introduced. The characteristics of thin film pressure sensors made of different materials are emphasized in detail. The performance differences of sensors made of different alloys and semiconductors are emphatically introduced with the reference for the selection of resistance layer materials provided. By summarizing the preparation methods of thin films, the preparation techniques of thin films pressure sensors are elaborated, and the research progress in recent years are summarized. Finally, based on the development of nanomaterials, micro-electro-mechanical systems (MEMS) technology and microwave technology, the future development of thin film pressure sensors is prospected by combining with the research status of thin film pressure sensors.