| 多功能宽离子束形成的研究 |
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| 引用本文： | 饶雨生,唐敦乙.多功能宽离子束形成的研究[J].西安交通大学学报,1992,26(1):21-28. |
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| 作者姓名： | 饶雨生 唐敦乙 |
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| 作者单位： | 西安交通大学电子工程系，西安交通大学电子工程系，西安交通大学电子工程系，西安交通大学电子工程系 |
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| 摘 要： | 本文讨论了多功能宽离子束形成的物理过程,给出了均匀束、会聚束及球状发散束的设计原则和方法,并列举了实例和测试方法.其中球状发散束则为首次提出的.这些宽离子束均已应用于离子束直接淀积、离子束溅射淀积及离子束辅助镀膜技术等薄膜工艺,效果良好.
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| 关 键 词： | 离子束 离子光学 离子源 薄膜 |
STUDY OF FORMATION OF VERSATILE BROAD ION BEAMS |
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| Rao Yusheng Tang Duiyi Liu Xiaozeng Shen Boli.STUDY OF FORMATION OF VERSATILE BROAD ION BEAMS[J].Journal of Xi'an Jiaotong University,1992,26(1):21-28. |
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| Authors: | Rao Yusheng Tang Duiyi Liu Xiaozeng Shen Boli |
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| Institution: | Department of Electronic Engineering |
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| Abstract: | A broad ion beam with various shapes and dynamic characteristics is in demand for thin film technology.Our broad beam ion source can produce multi- shape ion beams,such as uniform,convergent,and spherically-divergent beam, etc. In this paper the physical process of forming versatile broad ion beams is discussed,and design principles and methods of these Beams are given.The design examples are also described.These ion beams with various shapes have been applied to a variety of thin film techniques,including ion beam sputtering deposition,ion beam direct-deposition and ion beam assisted deposition. |
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| Keywords: | ion beams ion optics ion sources and thin films |
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