| ECR等离子体气相沉积装置磁场形态的计算 |
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| 引用本文： | 宁兆元,叶超.ECR等离子体气相沉积装置磁场形态的计算[J].苏州大学学报(医学版),1996,12(2):51-57. |
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| 作者姓名： | 宁兆元 叶超 |
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| 作者单位： | 苏州大学物理科学与技术学院薄膜材料实验室
(宁兆元，叶超，汪浩)，苏州大学物理科学与技术学院薄膜材料实验室(沈明荣) |
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| 摘 要： | 本文介绍了微波电子回旋共振等离子体气相沉积装置的磁场设计原理和计算方法,给出了几种电流强度、线圈间距等主要参量下的磁场形态.
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| 关 键 词： | 微波等离子体 气相沉积装置 磁场 |
MAGNETIC FIELD CONFIGURATION OF A MICROWAVE ELECTRON CYCLOTRON RESONANCE PLASMA DEPOSITION DEVICE |
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| Ning Zhaoyuan Ye Chao Wang Hao Shen Mingrong.MAGNETIC FIELD CONFIGURATION OF A MICROWAVE ELECTRON CYCLOTRON RESONANCE PLASMA DEPOSITION DEVICE[J].Journal of Suzhou University(Natural Science),1996,12(2):51-57. |
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| Authors: | Ning Zhaoyuan Ye Chao Wang Hao Shen Mingrong |
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| Abstract: | In this paper f the methods for designing and calculating the magnetic field of a microwave electron cyclotron resonance deposition device have been mentioned. The effects of the current and interval between two coils on the me genetic field profile have also been discussed |
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| Keywords: | Microwave plasma Chemical vapor deposition Magnetic field |
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