| 功能覆盖膜对场发射阵列（FEA）电子发射性能的影响 |
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| 引用本文： | 刘新福,柳襄怀.功能覆盖膜对场发射阵列（FEA）电子发射性能的影响[J].华东师范大学学报(自然科学版),1997(2):51-55. |
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| 作者姓名： | 刘新福 柳襄怀 |
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| 作者单位： | [1]华东师范大学电子科学技术系 [2]中科院上海冶金所 |
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| 摘 要： | 为了寻找适合真空微电子器件的场发射阵列（ＦＥＡ）覆盖材料，我们采用了一系列功能材料作为覆盖膜，薄膜淀积采用离子束辅助淀积（ＩＢＡＤ）以及其它淀积技术。在１０＾－６Ｐａ下测量具有不同覆盖膜的硅ＦＥＡ二极管的Ｉ－Ｖ特性，测量结果表明除Ａｕ和Ｍｏ外，其它覆盖材料都对ＦＥＡ电子发射性能有改进，经ＴａＮ覆盖的ＦＥＡ发射电流最大。由Ｆ－Ｎ曲线估算出有效表面功函数和有效发射面积，从而说明以上所得的实验结果。
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| 关 键 词： | 覆盖膜 场发射阵列 电子发射 真空微电子器件 |
The Action of Functional Coating Film on Electron Emission Ability of Field Emitter Array(FEA) |
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| Liu Xinfu, Li Qiong, Xu Jingfang, Fan Zhong, ChenCunhui.The Action of Functional Coating Film on Electron Emission Ability of Field Emitter Array(FEA)[J].Journal of East China Normal University(Natural Science),1997(2):51-55. |
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| Authors: | Liu Xinfu Li Qiong Xu Jingfang Fan Zhong ChenCunhui |
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| Abstract: | In order to find out the Si FEA coating material suitable to microelectronics devices,a serial of function material grown by ion Beam assisted Deposit Technology and others have,been adopted as a coating layer.Measurement of the emission by I-V characteristics at the pressure of 10~-6Pa range revealed that all coating layer improved the emission property exceptAu, Mo and TaN coating FEA shown the highest mission current. The effective surfacework function and effective surface emission area were evaluated from Fowler-Nordheim theory. From this analysis the experimental results can be interpreted. |
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| Keywords: | Funtional Coating Film Field Emitter Array Electron Emission |
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