| 检查集成电路光刻掩模的实时白光信息处理系统 |
| |
| 引用本文： | 岑剑常
,张坤明
,赵端程
,李介眉
,李绍泉.检查集成电路光刻掩模的实时白光信息处理系统[J].华南师范大学学报(自然科学版),1985,0(1):1. |
| |
| 作者姓名： | 岑剑常 张坤明 赵端程 李介眉 李绍泉 |
| |
| 摘 要： | 本文介绍一种用空间滤波检查集成电路光刻掩模的实时白光信息处理系统.采用该系统作检查比传统的镜检法或相干光学处理技术更为简便,且效果显著.借助这种技术能明显地察觉到掩模里的黑点、针孔、刻痕、电路损缺、短路或断路等微小缺陷.
|
| 关 键 词： | 集成电路光刻掩模 缺陷 检查 白光信息处理系统 空间滤波 方向滤波器 单透镜光学处理系统 |
A REAL-TIME WHITE LIGHT INFORMATION PROCESSING SYSTEM FOR IC PHOTOMASK INSPECTION |
| |
| Cen Zhaochang Zhang Kunming Zhao Duancheng Li Jiemei Li Shaoquan.A REAL-TIME WHITE LIGHT INFORMATION PROCESSING SYSTEM FOR IC PHOTOMASK INSPECTION[J].Journal of South China Normal University(Natural Science Edition),1985,0(1):1. |
| |
| Authors: | Cen Zhaochang Zhang Kunming Zhao Duancheng Li Jiemei Li Shaoquan |
| |
| Institution: | Cen Zhaochang Zhang Kunming Zhao Duancheng Li Jiemei Li Shaoquan |
| |
| Abstract: | A real-time white light information processing System using spatial filtering for IC photomask inspection is described. Inspection with this system is simpler and more convenient than the normal method with the microscopy or the technique with a coherent optical processing equip-ment. With the aid of this system, small defects such as black spots, pinholes, projections, loss of circuits, short-circu jts, or disconnections, etc. would be made obviously observable. |
| |
| Keywords: | IC photomask defect inspection whitelight information processing system spatial filtering directional filter one-lens optical processing system |
| 本文献已被 CNKI 等数据库收录！ |
| 点击此处可从《华南师范大学学报(自然科学版)》浏览原始摘要信息 |
| 点击此处可从《华南师范大学学报(自然科学版)》下载免费的PDF全文 |
