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大型衍射光栅刻划机控制系统研究
引用本文:刘栋材,申远,钟俊,齐向东,于海利,竺长安. 大型衍射光栅刻划机控制系统研究[J]. 中国科学技术大学学报, 2011, 0(6)
作者姓名:刘栋材  申远  钟俊  齐向东  于海利  竺长安
作者单位:中国科学技术大学精密机械与精密仪器系;长春光学精密机械与物理研究所;
基金项目:“十一五”国家科技支撑计划重大项目(2006BAK03A02); 国家重大科研装备研制项目(ZBYZ2008-1); 中国科学院重大科研装备研制项目(YZ200804)资助
摘    要:
介绍了大型高精度衍射光栅刻划机的机械结构及其控制系统设计,并针对具有复杂机械结构的控制系统研究了一种新的仿真方法.通过利用Pro/Mechanism模块中的Custom Load(定制负荷)插件实现控制算法,从而在虚拟样机上实现运动控制的仿真.采用这种方法,在光栅刻划机上进行了精定位控制仿真,并基于仿真结果进行控制方案优化,提高了控制系统的开发效率和控制方案的有效性.

关 键 词:高精度光栅  机械结构  控制系统  定制负荷  

Research on the controlling system of a grating ruling engine
LIU Dongcai,SHEN Yuan,ZHONG Jun,QI Xiangdong,YU Haili,ZHU Changan. Research on the controlling system of a grating ruling engine[J]. Journal of University of Science and Technology of China, 2011, 0(6)
Authors:LIU Dongcai  SHEN Yuan  ZHONG Jun  QI Xiangdong  YU Haili  ZHU Changan
Affiliation:LIU Dongcai1,SHEN Yuan1,ZHONG Jun1,QI Xiangdong2,YU Haili2,ZHU Changan1(1.Dept.of Precision Machinery and Instrumentation,University of Science and Technology of China,Hefei 230027,China,2.Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China)
Abstract:
The mechanical structure and control system of a large and high-precision diffraction grating ruling engine were described and a new simulation method was presented for the control system with a complex mechanical structure.A Custom Load plug-in of Pro/Mechanism was used to implement the control algorithm,and the motion control was simulated on the virtual prototype.In this way,simulation of the precision positioning of a grating ruling engine can be performed to optimize the control logic based on the simu...
Keywords:high-precision grating  mechanical structure  controlling system  Custom Load  
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