| ZnO/IDT/SiO2结构声表面波传感器仿真和分析 |
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| 引用本文： | 梅红芳.ZnO/IDT/SiO2结构声表面波传感器仿真和分析[J].科学技术与工程,2011,11(21):5029-5033,5038. |
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| 作者姓名： | 梅红芳 |
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| 作者单位： | 中国电子科技集团第三十八研究所,合肥,230088 |
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| 摘 要： | 针对现有声表面波理论模型难以分析多层结构声表面波传感器器件的缺点,利用周期性介质的矩阵本征算子模型,成功对ZnO/IDT/SiO2多层结构中IDT电极的机械特性对装置性能的影响进行了建模。基于此模型,仿真和分析了此结构装置的波传播速度、机械耦合系数等参数与波导层厚度以及电极厚度的关系。并将仿真结果得到的装置传输频率响应与试验结果进行比较,二者基本一致。
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| 关 键 词： | ZnO/IDT/SiO2 声表面波传感器 矩阵本征算子 多层声表面波器件 |
| 收稿时间： | 2011/4/19 0:00:00 |
| 修稿时间： | 2011/4/19 0:00:00 |
The Modelling and Analysis of Surface Acoustic Wave Sensor Based on ZnO/IDT/SiO2 |
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| meihongfang.The Modelling and Analysis of Surface Acoustic Wave Sensor Based on ZnO/IDT/SiO2[J].Science Technology and Engineering,2011,11(21):5029-5033,5038. |
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| Authors: | meihongfang |
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| Institution: | MEI Hong-fang (No.38 Institute of CETC,Hefei 230088,P.R.China) |
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| Abstract: | Aimed at the shortcomings of the classical theory of surface acoustic wave(SAW),which can't model and analysis the layered surface acoustic wave device very well,a new theory and method based on matrix eigen-operator for periodic media is proposed.The layered device of ZnO/IDT/SiO2 is modeled and analyzed based on this method.The relations between the parameters of the device such as velocity,electromechanical coupling coefficient,etc,and the thickness of the waveguide layer and the IDT electrodes is analyz... |
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| Keywords: | ZnO/IDT/SiO2 SAW sensor matrix eigen-operator layered SAW device |
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