AFM对TiN薄膜和聚酰亚胺微观结构的分析

论述了一种高精度的原子力显微镜AFM．IPC-208B型机在分子形态学方面的应用．以磁控溅射获得的TiN薄膜和普通的聚酰亚胺纤维为例，从原子力显微镜测得的三维图上探析该TiN薄膜的优先生长面及其在优先生长面上的原子排布和聚酰亚胺的表面形态．这种实验不仅鉴定了测试材料的微观形态，也充分肯定了该原子力显微镜原子量级的精度及其在微观结构领域的潜在发展，为该机应用于微加工领域奠定了基础．

Analysis on Micro-structure of TiN Thin Film and Polyimide with AFM

The study in molecular morphology is given with a highresolution Atomic Force Microscope AFM.IPC-208B.By taking TiN thim film prepared by magnerton sputtering method and polymide(PI) fibre for examples,the preferenthal growing plme of TiN thin film,the atomic arranges of TiN thin film on the preferential growing plme and the surficial micro-structure can be ascertained form the three-dimensional images obtamed by AFM.IPC-208B.These experiments not only identify small structures of the materials,but also affirm that AFM.IPC-208B holds the precision of atomic level and potential application in micro-structure field,at the same time it establishs the groundwork for the application in micro-process kingdom.