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Structure and properties of carbon nitrogen films synthesized by ion beam-assisted deposition |
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| Institution: | HE Xiaoming LI Wenzhi LI Hengde (Department of Materials Scienoe and Engineering, Tsinghua University, Beijing 100084, China) |
| Abstract: | |
| Keywords: | β-C3N4 carbon nitrogen films low-energy ion bombardment ion beam-assisted deposition |
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