TaAgN复合膜显微结构、力学性能和摩擦性能的研究

采用非平衡反应磁控溅射法制备了TaAgN复合膜。利用X射线衍射仪、CSM纳米压痕测试仪和摩擦磨损测试了复合膜的显微结构、力学性能和摩擦性能。结果显示，TaAgN复合膜由面心立方结构的TaN相和底心斜方结构的Ta₄N相组成。随着Ag靶功率的增加，硬度H、弹性模量E、弹性恢复W_e和H³/E²值均呈先升高后降低的趋势，最大值分别为34 GPa，394 GPa，57%和250 MPa。随着Ag靶功率的增加，TaAgN复合膜室温下的平均摩擦因数呈降低趋势。当Ag靶功率为25 W时，随着温度的升高，TaAgN复合膜的平均摩擦因数逐渐减小。

Microstructures, Mechanical Properties and Tribological Performances of TaAgN Composite Films

TaAgN composite films were prepared by reactive magnetron sputtering technique. The microstructure, mechanical properties and tribological performances were investigated by X-ray diffraction, nano-indentation, and ball-on-disc tribo-meter, respectively. The result shows that TaAgN composite film is composed of fcc-structured TaN and base-centered orthor-hombic-structrued Ta₄N. The value of Hardness H, Elastic modulus E, Elastic recovery W_e and H³/E² are all first increased and then decreased with increasing Ag target power. The highest values are 34 GPa, 394 GPa, 57% and 250 MPa, respectively. The friction coefficient of TaAgN film at room temperature decreases gradually with increasing Ag target power. For the TaAgN film prepared under the Ag target power of 25 W, the friction coefficient decreases gradually with increase of measuring temperature.