基于光子晶体微腔和光纤环形衰荡的微力传感器

提出一种基于光子晶体微腔的高灵敏度的微力测量方法.首先，提出一种M型结构的梁作为传感探头，使系统在受到微力作用时，仅有光子晶体微腔的空气孔折射率发生变化而引起谐振波长的漂移，极大地提高了传感器的线性度和测量范围.然后，对微纳环结构的光子晶体微腔结构进行优化设计，获得了品质因子高达7100的微腔.最后，选择合适的实验器件及其特性参数，搭建基于光纤环形衰荡的波长解调系统，实验结果表明该系统的波长解调灵敏度为90μs/nm，所设计的微力测量系统的灵敏度可达194.616μs/μN.

Micro-force Sensor Based on Photonic Crystal Micro-cavity and Fiber Loop Ring-Down

A high-sensitive micro-force measurement method based on photonic crystal micro-cavity was proposed. Firstly， an M-typed beam was proposed as the sensing head， thus the resonance wavelength drift of the micro-cavity will only be affected by holes refractive index of photonic crystal micro-cavity when force was applied on this system， which could greatly improve the linearity and measurement range of sensor. Then， the structure of photonic crystal micro-cavity with micro-ring structure was optimized， and the quality factor of 7100 was obtained. Finally， the wavelength demodulation system based on fiber loop ring-down was built， with proper selection and design of experimental apparatuses， and the wavelength demodulation sensitivity could reach to 90μs/nm. Therefore， it was demonstrated that the measurement sensitivity of 194.616μs/μN could be obtained by using our proposed micro-force measurement system.