| 微测辐射热计用VO2薄膜及其改性研究 |
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| 引用本文： | 杨培志,刘黎明,莫镜辉. 微测辐射热计用VO2薄膜及其改性研究[J]. 云南师范大学学报(自然科学版), 2011, 31(2) |
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| 作者姓名： | 杨培志 刘黎明 莫镜辉 |
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| 作者单位： | 1. 云南师范大学可再生能源材料先进技术与制备教育部重点实验室,云南,昆明,650092
2. 昆明物理研究所,云南,昆明,650223 |
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| 摘 要： | 二氧化钒(VO2)薄膜是目前微测辐射热计的首选材料,但其性能还有很大的提高空间,开展其改性研究具有重要意义。VO2薄膜改性旨在通过材料组分和结构的调控获得更好的性能,以满足高性能微测辐射热计应用的要求。目前改善VO2薄膜热敏电阻特性的主要方法是采用离子掺杂和新的形态结构(纳米和非晶)。文章介绍了VO2的基本结构及其在微测辐射热计上的应用,综述了离子掺杂、纳米及非晶结构VO2薄膜的研究现状,并提出了未来VO2薄膜改性研究的方向。
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| 关 键 词： | VO2薄膜 改性研究 离子掺杂 纳米结构 微测辐射热计 |
Vanadium Dioxide Thin Films for Microbolometer Application and Their Modification Study |
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| YANG Pei-zhi,LIU Li-ming,MO Jing-hui. Vanadium Dioxide Thin Films for Microbolometer Application and Their Modification Study[J]. Journal of Yunnan Normal University (Natural Sciences Edition), 2011, 31(2) |
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| Authors: | YANG Pei-zhi LIU Li-ming MO Jing-hui |
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| Affiliation: | YANG Pei-zhi1,LIU Li-ming2,MO Jing-hui2(1.Key laboratory of advanced renewable energy materials and fabrication technology,Ministry of education,Yunnan Normal University,Kunming 650092,China,2.Kunming Institute of Physics,Kunming 650223,China) |
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| Abstract: | Vanadium dioxide(VO2) thin films are the preferable infrared sensitive material for microbolometer application,but their performance is far from optimization until now,so the modification study of VO2 thin films is really full of significance.For high performance microbolometer application,the modification is aimed to obtain better material properties by controlling the composition and microstructure of VO2 thin films.At present,ions doping and new microstructure(i.e.nano and amorphous structure) are adoptd... |
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| Keywords: | vanadium dioxide thin films modification study ions doping nano structure microbolometer |
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