| 数控辅助超精密定位工作平台的研究 |
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| 引用本文： | 陈明方,邹平,韩钢,侯伯民.数控辅助超精密定位工作平台的研究[J].东北大学学报(自然科学版),2013,34(6):875-879. |
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| 作者姓名： | 陈明方 邹平 韩钢 侯伯民 |
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| 作者单位： | 1. 东北大学机械工程与自动化学院,辽宁沈阳,110819
2. 沈阳职业技术学院电气工程系,辽宁沈阳,110045 |
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| 基金项目： | 辽宁省自然科学基金资助项目，沈阳市科技局重点科技攻关项目，沈阳市科技局工业科技攻关项目 |
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| 摘 要： | 在超精密加工中，需要亚微米乃至纳米级的定位，而常规的伺服电机驱动、精密滚珠丝杠传动方案的定位精度一般只能达到微米级.为提高数控进给装置的定位精度，在原有伺服进给定位装置的基础上，总结现有微定位补偿机构设计的不足，提出新的闭环伺服精密微位移补偿控制方案，以显著减小数控伺服进给装置的定位误差.设计的压电驱动微定位工作台具有纳米级位移分辨率和定位精度，静、动刚度好.试验表明，本系统设计的10μm行程微定位平台能很好地补偿数控滚珠丝杠副定位偏差，实现超精密加工的超精密进给要求.
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| 关 键 词： | 微定位 TMS320F28335 电涡流 高精数据采集 进给装置 |
Research on NC Auxiliary Ultra-Precision Positioning Work Platform |
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| CHEN Ming-fang,ZOU Ping,HAN Gang,HOU Bo-min.Research on NC Auxiliary Ultra-Precision Positioning Work Platform[J].Journal of Northeastern University(Natural Science),2013,34(6):875-879. |
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| Authors: | CHEN Ming-fang ZOU Ping HAN Gang HOU Bo-min |
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| Institution: | 1.School of Mechanical Engineering & Automation,Northeastern University,Shenyang 110819,China;2.Department of Electrical Engineering,Shenyang Vocational and Technical College,Shenyang 110045,China |
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| Abstract: | Submicron or even nanoscale positioning accuracy is generally required during ultra precision machining. The positioning accuracy of conventional servo motor and precision ball screw driver can only reach micron level. To improve the positioning accuracy of CNC feed device， this paper proposes a new closed loop displacement compensation control program based on the original positioning device. Displacement resolution and positioning accuracy of the piezoelectric drive micro positioning work platform can reach nanoscale level. Good performances both in static and dynamic stiffness are obtained. The tests show that 10μm stroke ultra precision micro positioning platform can perfectly compensate the deviation of CNC ball screw positioning and achieve the requirements of ultra precision machining feed. |
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| Keywords: | micro-positioning TMS320F28335 eddy current high-precision data acquisition feed device |
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