| 熔凝玻璃膜钠离子迁移率测量及研究 |
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| 引用本文： | 秦祖新,张安康.熔凝玻璃膜钠离子迁移率测量及研究[J].华中科技大学学报(自然科学版),1988(Z2). |
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| 作者姓名： | 秦祖新 张安康 |
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| 作者单位： | 华中理工大学固体电子学系
(秦祖新)，南京工学院(张安康) |
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| 摘 要： | 本文提出利用IMA测量介质膜中可动离子漂移迁移率的新方法,并用该方法测量了熔凝玻璃膜中Na~+漂移迁移率,研究了Na~+迁移率与温度的关系。
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| 关 键 词： | 玻璃膜 迁移率测量 稳定性 可动离子 |
Investigation and Measurement of Na~+ Mobility in Fused Glass Film |
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| Qin Zuxin Zhang Ankang.Investigation and Measurement of Na~+ Mobility in Fused Glass Film[J].JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE,1988(Z2). |
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| Authors: | Qin Zuxin Zhang Ankang |
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| Institution: | Qin Zuxin Zhang Ankang |
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| Abstract: | The IMA method for investigating and measuring the behaviour of the mobile ions in dielectric films is described. By integrating the B-T measuring method with the ion beam sputtering technique, more information about the behaviour of the mobile ion in the film can be obtained and with higher accuracy. The Na+ ion mobility in glassivation has been measured and the error is about 8.6%.The measured results show that the migration of mobile ions in the film plays the main role in electric conduction and Na+ mobility in glass film is much lower than that in SiO2 film. It is concluded that the fused glass film can be used as surface passivation coating for semiconductor devices to improve the reliability of the devices. |
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| Keywords: | Glass film Mobility measurement Stability Mobile ion |
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