| 金刚石聚晶薄膜制备及其电子场的发射性能 |
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| 引用本文： | 程春晓,高金海,张永胜.金刚石聚晶薄膜制备及其电子场的发射性能[J].河南科技大学学报(自然科学版),2010,31(1):88-90. |
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| 作者姓名： | 程春晓 高金海 张永胜 |
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| 作者单位： | 1. 洛阳理工学院,数理系,河南,洛阳,471023
2. 郑州师范高等专科学校,物理系,河南,郑州,450044 |
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| 基金项目： | 国家自然科学基金项目(60876014);;河南省自然科学基金项目(072300410180);;河南省高校科技创新人才支持计划(2008HASTIT029) |
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| 摘 要： | 微波等离子体化学气相沉积是制备微/纳米结构的方法之一,使用该方法在陶瓷衬底上制备微米金刚石聚晶材料薄膜。利用扫描电子显微镜表征了材料的表面形貌,单元尺寸一致,分布均匀。使用X射线衍射和拉曼光谱分析了薄膜的结构,测试了薄膜材料的电子场发射性能。数据表明:制备的薄膜材料开启电场为1.25V/μm,在2.55V/μm的电场下,其电子场发射电流密度达到6.3mA/cm2。
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| 关 键 词： | 化学气相沉积 金刚石聚晶薄膜 场发射 陶瓷衬底 |
Fabrication and Field Emission Properties of Diamond Microcrystalline-aggregate |
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| CHENG Chun-Xiao,GAO Jin-Hai,ZHANG Yong-Sheng.Fabrication and Field Emission Properties of Diamond Microcrystalline-aggregate[J].Journal of Henan University of Science & Technology:Natural Science,2010,31(1):88-90. |
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| Authors: | CHENG Chun-Xiao GAO Jin-Hai ZHANG Yong-Sheng |
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| Institution: | 1.Department of Mathematics & Physics/a>;Luoyang Institute of Science & Technology/a>;Luoyang 471023/a>;China/a>;2.Department of Physics/a>;Zhengzhou Teachers College/a>;Zhengzhou 450044/a>;China |
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| Abstract: | The diamond microcrystalline-aggregates films were fabricated on the ceramic substrates using the microwave plasma chemical vapor deposition.The surface morphology of the as-fabricated materials was characterized by means of scanning electron microscopy(SEM).It is found that the units have a similar size and uniform distribution.The X-ray diffraction(XRD)and Raman scattering spectroscopy were used to identify the crystal nanostructures.The field emission properties were tested by a diode structure in a vacu... |
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| Keywords: | Chemical vapor deposition Diamond microcrystalline-aggregate Field emission Ceramic substrate |
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